{
 "license": "CC BY 4.0 — Tremon Solutions, https://www.tremon.nl/gases/cf4",
 "generated": "2026-09-17",
 "key": "cf4",
 "name": "Tetrafluoromethane (PFC-14)",
 "formula": "CF₄",
 "formula_plain": "CF4",
 "iupac": "tetrafluoromethane",
 "synonyms": [],
 "cas": "75-73-0",
 "ec_number": "200-896-5",
 "un_number": "1982",
 "un_shipping_name": "Tetrafluoromethane",
 "transport_class": "2.2 (Non-flammable, non-toxic gases)",
 "pubchem_cid": 6393,
 "molar_mass_g_mol": 88.01,
 "mg_m3_per_ppm_20c": 3.66,
 "boiling_point_c": -128.0,
 "sublimation_point_c": null,
 "melting_point_c": -184.0,
 "critical_temp_c": -45.6,
 "critical_pressure_bar": 37.4,
 "vapour_pressure_bar": null,
 "vapour_pressure_at_c": null,
 "density_gas_kg_m3": 3.946,
 "density_condition": "0 °C, 1013 mbar",
 "relative_density_air": 3.052,
 "solubility_water": "5,7 ml/l at 20 °C",
 "appearance": "gas liquefied under pressure, colourless, odourless",
 "odour": "odourless",
 "chemical_character": [
  "Non-combustible gas.",
  "Only slightly soluble in water.",
  "Gas is heavier than air.",
  "Danger of suffocation at high concentrations due to oxygen displacement."
 ],
 "hazard_class": "asphyxiant; greenhouse gas (PFC, lifetime 50 000 yr)",
 "ghs_classification": [
  "Gases under pressure, liquefied gas; H280"
 ],
 "ghs_signal_word": "Warning",
 "ghs_hazard_statements": [
  "H280: Contains gas under pressure; may explode if heated."
 ],
 "euh_statements": [],
 "nfpa704": {
  "health": 1,
  "flammability": 0,
  "instability": 0,
  "special": "SA"
 },
 "lel_vol_pct": null,
 "uel_vol_pct": null,
 "autoignition_c": null,
 "temperature_class": null,
 "explosion_group": null,
 "eu_ioelv": {
  "twa_8h_ppm": null,
  "twa_8h_mg_m3": null,
  "stel_15min_ppm": null,
  "stel_15min_mg_m3": null,
  "directive": null
 },
 "de_agw": {
  "twa_ppm": null,
  "twa_mg_m3": null,
  "source": "TRGS 900 via GESTIS"
 },
 "nl_grenswaarde": {
  "note": "Netherlands: wettelijke grenswaarden (Arboregeling, bijlage XIII) — check the SER grenswaarden database (https://www.ser.nl/nl/thema/arbeidsomstandigheden/grenswaarden) for the current legal value; EU IOELVs are transposed into it."
 },
 "niosh_rel": {
  "twa_ppm": null,
  "stel_or_ceiling_ppm": null,
  "raw": null
 },
 "osha_pel": null,
 "idlh_ppm": null,
 "idlh_raw": null,
 "gwp100": {
  "ar4": 7390,
  "ar6": 7380,
  "eu_fgas_2024_573_annex": 7380
 },
 "atmospheric_lifetime_years": 50000,
 "odp": 0,
 "gwp_note": null,
 "seveso_named": false,
 "health_effects": "Inert, non-toxic simple asphyxiant; heavier than air. Extreme atmospheric persistence (50 000 years) is the reason for control, not acute toxicity.",
 "main_toxic_effects_gestis": "Acute effects: \nFrostbite after contact with liquefied R 14,\nsuffocation due to oxygen displacement;\nChronic effects: \nNo information available",
 "routes_of_exposure": "Main routes of exposure\nThe main route of exposure for tetrafluoromethane (R 14) is via the respiratory tract.\nRespiratory tract\nSpecific information on the inhalation of R 14 is not available.\nResults from kinetic studies with comparable completely halogenated CFCs indicate that the fluorinated hydrocarbon R14 can also easily enter the blood via the lungs.\nHowever, when following the tendency of the identified retention values in the CFC series, the R14 portion retained in the organism after inhalation is expected to be relatively low.\nSkin\nResorption via the skin is expected to be hardly probable during the handling of R 14, which is gaseous under normal conditions and is only liquid in cryogenic condition or under pressure.\nGastrointestinal tract\nOral intake of liquefied (under normal conditions immediately vaporising) R13 must not be expected according to the described physical-chemical features of the substance.",
 "ir_absorption_band_um": "7.8 µm (ν₃ C–F stretch, 1283 cm⁻¹) — very strong",
 "monitoring": [
  "NDIR (7.8 µm) for semiconductor fab exhaust and PFC abatement efficiency (DRE) measurement; FTIR/QMS in the lab.",
  "No OEL of concern (inert); monitored for emissions reporting (ETS/IED) not for health."
 ],
 "regulation_windows": [
  "F-gas 2024/573 Annex I (PFC-14, GWP 7380) — semiconductor PFC reporting; EU ETS / IED emissions reporting",
  "No OEL of concern"
 ],
 "tremon_products": [
  "DM-91 (CF₄ mixtures)",
  "IR·OEM CF₄ channel"
 ],
 "sources": [
  "https://gestis-database.dguv.de/data?name=040030",
  "https://pubchem.ncbi.nlm.nih.gov/compound/6393",
  "IPCC AR6 WG1 Ch.7 Supplementary Material, Table 7.SM.7 (https://www.ipcc.ch/report/ar6/wg1/downloads/report/IPCC_AR6_WGI_Chapter07_SM.pdf)",
  "IPCC AR4 WG1 Ch.2, Table 2.14 (https://www.ipcc.ch/site/assets/uploads/2018/02/ar4-wg1-chapter2-1.pdf)",
  "Regulation (EU) 2024/573, Annex I/III (https://eur-lex.europa.eu/eli/reg/2024/573/oj)",
  "HITRAN/NIST IR band positions (approximate centre of the strongest band used for NDIR; https://hitran.org, https://webbook.nist.gov)"
 ]
}